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Optimisation of low-temperature silicon epitaxy on seeded glass substrates by ion-assisted deposition

Materials ScienceMaterials EngineeringIon ImplantationEpitaxial GrowthEngineeringMicrofabricationIon-assisted DepositionSeeded Glass SubstratesSurface ScienceApplied PhysicsSemiconductor Device FabricationMolecular Beam EpitaxySilicon On InsulatorMicroelectronicsLow-temperature Silicon Epitaxy