Selectivity and Si-load in deep trench etching - Concepedia

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Selectivity and Si-load in deep trench etching

22

Citations

8

References

1995

Year

K. Paul Mu ̈ller, Klaus Roithner, Hans-Jo ̈rg Timme

Microelectronic Engineering

EngineeringDeep TrenchApplied PhysicsSilicon On InsulatorMicroelectronicsPlasma Etching

References

	Year	Citations

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