Applied Physics Letters · 1988 · 50 citations · 5 references
Natural SciencesMaterials SciencePhysicsAcousticsThin FilmsAcoustic MaterialsAcoustic MeasurementAcoustic Wave PropagationPhysical AcousticsSilicon MaterialsThin Film Mechanical PropertiesAcoustic Characterization Of MaterialsAcoustic Material CharacterizationAcoustic PropertiesAmorphous SiliconElastic ModulusElastic Modulus MeasurementReactive SputteringSputtering
The sound velocity and elastic modulus of a series of amorphous silicon oxynitride films produced by reactive sputtering have been measured as a function of nitrogen content. The acoustic pulses were generated and detected with ultrashort light pulses. The sound velocity was found to depend linearly on the nitrogen content.
5
Surface generation and detection of phonons by picosecond light pulses
C. Thomsen, H. T. Grahn, Humphrey J. Maris et al. · Physical review. B, Condensed matter · 1986 · 1.6K citations