Concepedia

Epitaxial electro-optical Sr<i>x</i>Ba1−<i>x</i>Nb2O6 films by single-source plasma-enhanced metalorganic chemical vapor deposition

Jian Zhao, F. Wang, P. Norris, G. Fogarty, B. Steiner, Peng Lu, B. H. Kear, Seongchan Kang, B. Gallois, Michael B. Sinclair,

Applied Physics Letters · 1995 · 14 citations · 0 references

DOI

Concepts

Materials EngineeringMaterials ScienceSrxba1−xnb2o6 FilmsOptical MaterialsEngineeringBulk CrystalsPhysicsEpitaxial GrowthOptical PropertiesApplied PhysicsChemical Vapor DepositionThin FilmsPulsed Laser DepositionChemical DepositionMolecular Beam EpitaxyMgo SubstratesThin Film Processing

Abstract

SrxBa1−xNb2O6 films have been epitaxially grown on MgO substrates by a single-source plasma-enhanced chemical vapor deposition (PE-CVD). Exceptionally high quality of the epitaxial films was observed as indicated by high-resolution synchrotron x-ray diffraction imaging. The films exhibit waveguiding behavior with values of refractive index and the linear electro-optic coefficient r51 close to those of bulk crystals.