Concepedia
Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 1990 · 13 citations · 17 references
Open access
Natural SciencesMaterials SciencePhysicsPlasma PhysicsAtomic IonizationHeavy-ion PhysicsIonization ChambersIonization TechniquesPlasma SourcesIon Source DesignIon SourcesNegative Ion SourcesSputteringSputtering Techniques
17
Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
Peter Sigmund · Physical Review · 1969 · 3.5K citations
Natural Sciences, Physics, Atomic Physics +13
II. The energy spectrum of ejected atoms during the high energy sputtering of gold
M. W. Thompson · Philosophical magazine · 1968 · 1.2K citations
Natural Sciences, Materials Science, Physics +15
Secondary-ion emission probability in sputtering
Jens K. Nørskov, Bengt I. Lundqvist · Physical review. B, Condensed matter · 1979 · 383 citations
Natural Sciences, Materials Science, Physics +13
A versatile high intensity negative ion source
R. Middleton · Nuclear Instruments and Methods in Physics Research · 1983 · 209 citations
Natural Sciences, Chemistry, Physics +3
Work-Function Dependence of Negative-Ion Production during Sputtering
Ming L. Yu · Physical Review Letters · 1978 · 200 citations
Natural Sciences, Chemistry, Materials Science +17