Hydrogen implantation and diffusion in silicon and silicon dioxide - Concepedia

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Hydrogen implantation and diffusion in silicon and silicon dioxide

63

Citations

14

References

1995

Year

D. Fink, J. Krauser, D. Nagengast, T. Almeida Murphy, J. Erxmeier, L. Palmetshofer, D. Br�unig, A. Weidinger

Applied Physics A

Hydrogen ImplantationEngineeringPhysicsHydrogen TransitionApplied PhysicsSemiconductor Device FabricationHydrogenSilicon On Insulator

References

	Year	Citations

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