Roll-type thermoelectric devices with InN thin films

Abstract

In terms of the approach to the integration of thermoelectric devices, we proposed a roll-type thermoelectric device. We studied the load characteristics of the thermoelectric microdevices using InN thin films prepared by reactive radio-frequency sputtering. It consisted 60-pair or 120-pair InN-chromel films, which were deposited on polyimide film. For the 120-pair device, the maximum open output voltage and the maximum output power were 210 mV and 65 nW, respectively, at temperature difference of 168 K.