Silicon ribbon growth via the ribbon-to-ribbon (RTR) technique: Process update and material characterization - Concepedia

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Silicon ribbon growth via the ribbon-to-ribbon (RTR) technique: Process update and material characterization

27

Citations

3

References

1978

Year

R. W. Gurtler, A. Baghdadi, R. Ellis, I. A. Lesk

Journal of Electronic Materials

Materials ScienceMaterials EngineeringSilicon Ribbon GrowthEngineeringMicrofabricationMaterial CharacterizationApplied PhysicsSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorProcess UpdateMicrostructure

References

	Year	Citations

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