Publication | Closed Access
The mechanisms of etch pit and ripple structure formation on ion bombarded Si and other amorphous solids
70
Citations
13
References
1980
Year
Materials EngineeringMaterials ScienceIon ImplantationEngineeringEtch PitSurface ScienceApplied PhysicsIon BeamRipple Structure FormationAmorphous SolidPlasma EtchingOther Amorphous Solids
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