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Prediction of residual stress distribution in multi-stacked thin film by curvature measurement and iterative FEA

Materials ScienceEngineeringStrain LocalizationStressstrain AnalysisMulti-stacked Thin FilmSolid MechanicsResidual StressResidual Stress DistributionThin FilmsStructural MechanicsCurvature MeasurementPhotoelasticityMechanics Of MaterialsHigh Strain Rate