Phosphinochalcogenoic amidato complexes of zinc and cadmium as novel single‐source precursors for the deposition of metal selenide and telluride films

Abstract

Potential single‐source precursors for metal chalcogenide semi‐conductor films , such as zinc and cadmium selenides and tellurides, have in the past proved to be difficult to synthesize, thermally unstable, or insufficiently volatile. The title compounds are found to yield high purity metal selenide and telluride films without the incorporation of nitrogen or the formation of nitro‐ gen‐containing phases.