Publication | Closed Access
The structure and electrical properties of HfTaON high-k films prepared by DIBSD
18
Citations
32
References
2011
Year
Materials ScienceBoron NitrideEngineeringHexagonal Boron NitrideApplied PhysicsHftaon High-k FilmsSemiconductor MaterialThin FilmsMolecular Beam EpitaxyElectrical Properties
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