<i>In situ</i> transmission electron microscopy analysis of conductive filament during solid electrolyte resistance switching

Abstract

An in situ transmission electron microscopy (TEM) analysis of a solid electrolyte, Cu–GeS, during resistance switching is reported. Real-time observations of the filament formation and disappearance process were performed in the TEM instrument and the conductive-filament-formation model was confirmed experimentally. Narrow conductive filaments were formed corresponding to resistance switching from high- to low-resistance states. When the resistance changed to high-resistance state, the filament disappeared. It was also confirmed by use of selected area diffractometry and energy-dispersive x-ray spectroscopy that the conductive filament was made of nanocrystals composed mainly of Cu.