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Fabrication of single crystal Si cantilevers using a dry release process and application in a capacitive-type humidity sensor

DOIFull Paper Access

55

Citations

14

References

2002

Year

S. Chatzandroulis, A. Tserepi, D. Goustouridis, P. Normand, D. Tsoukalas
Microelectronic Engineering

References

YearCitations

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