High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35–50??nm

Abstract

Sc-Si multilayers are suggested as high-reflectivity coatings for a VUV interval of 35-50 nm. Fabricated mirrors show normal-incidence reflectivity of 30-54%, which is high enough for effective manipulation of the beams of compact-discharge, laser-driven x-ray lasers. The values obtained are not, however, limits for Sc-Si coatings. Theoretical estimations as well as electron microscopy studies of Sc-Si interfaces indicate a large potential for a further increase in their reflectivity.