Publication | Closed Access
Photothermal and photoconductive determination of surface and bulk defect densities in amorphous silicon films
172
Citations
16
References
1987
Year
EngineeringInterface State AbsorptionChemistrySilicon On InsulatorPhotoconductive DeterminationIi-vi SemiconductorOptical PropertiesBulk Defect DensitiesThin Film ProcessingMaterials SciencePhysicsSemiconductor MaterialSemiconductor Device FabricationNatural SciencesSurface ScienceApplied PhysicsAmorphous SiliconLight AbsorptionAmorphous SolidSubgap AbsorptionOptoelectronicsAmorphous Silicon Films
The sub-band-gap optical absorption spectra of high-quality hydrogenated amorphous silicon (a-Si:H) films are shown to be dominated by surface and interface state absorption when measured by photothermal deflection spectroscopy (PDS), while spectra determined using the constant photocurrent method (CPM) are not. For bulk defect states (both as-deposited and light-induced), the integrated subgap absorption is approximately twice as large for PDS as for CPM. Similarly, the conversion factor relating integrated subgap absorption with neutral dangling bond density is twice as large for CPM as PDS. This factor of 2 results from CPM seeing only transitions from below midgap into the conduction band while PDS sees transitions from the valence band into states above midgap as well.
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