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Analytical closed-form solutions for size-dependent static pull-in behavior in electrostatic micro-actuators via Fredholm integral equation

Analytical Closed-form SolutionsElectrical EngineeringEngineeringSoft RoboticsMicrofabricationMechanicsMechanical EngineeringMechatronicsMechanical SystemsFredholm Integral EquationElectrostatic Micro-actuatorsBiomimetic ActuatorActuationMicroactuatorMicro-electromechanical System