Publication | Closed Access
Fractal characterization of the silicon surfaces produced by ion beam irradiation of varying fluences
50
Citations
39
References
2015
Year
Materials ScienceIon ImplantationEngineeringCrystalline DefectsMicrofabricationOptical PropertiesPhysicsSurface ScienceApplied PhysicsFractal CharacterizationIon Beam IrradiationIon BeamSilicon SurfacesIon EmissionMicroelectronicsSilicon On Insulator
| Year | Citations | |
|---|---|---|
Page 1
Page 1