FIB micromachined submicron thickness cantilevers for the study of thin film properties

Calculated elastic constants for stress problems associated with semiconductor devices

William A. Brantley · Journal of Applied Physics · 1973 · 1.2K citations

Natural Sciences, Materials Engineering, Materials Science +17

Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films

Timothy P. Weihs, Soon-Il Hong, J. C. Bravman et al. · Journal of materials research/Pratt's guide to venture capital sources · 1988 · 380 citations

Natural Sciences, Materials Science, Mechanical Engineering +14

Fracture testing of silicon microelements <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> in a scanning electron microscope

Stefan Johansson, Jan‐Åke Schweitz, L Tenerz et al. · Journal of Applied Physics · 1988 · 225 citations

Engineering, Materials Engineering, Materials Science +17

Micromechanical fracture strength of silicon

Fredric Ericson, Jan‐Åke Schweitz · Journal of Applied Physics · 1990 · 210 citations

Natural Sciences, Materials Engineering, Materials Science +17

Mechanical Characterization of Thin Films by Micromechanical Techniques

Jan‐Åke Schweitz · MRS Bulletin · 1992 · 164 citations

Natural Sciences, Materials Engineering, Materials Science +14