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FIB micromachined submicron thickness cantilevers for the study of thin film properties

Materials ScienceSubmicron Thickness CantileversEngineeringFlexible ElectronicsMicrofabricationMicromachinesMechanical EngineeringApplied PhysicsThin Film PropertiesThin Film Process TechnologyThin FilmsElectronic PackagingMicroelectronicsMicro-electromechanical SystemThin Film ProcessingMicrostructure