Concepedia
Thin Solid Films · 1981 · 218 citations · 1 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface ChemistrySurface ScienceThin FilmsCoating ProcessesCoatingsSurface CoatingsSurface PhysicsThin-film DepositionThin-film MaterialsThin Film Deposition MaterialsThin-film Coatings
1
Chemical Vapor Deposition at Low Temperatures
J.C. Viguie · Journal of The Electrochemical Society · 1975 · 228 citations
Natural Sciences, Materials Engineering, Materials Science +9