14 GHz microstrip MEMS phase shifters on flexible, organic substrate

Abstract

One and two bit microelectromechanical system (MEMS) microstrip phase shifters at 14 GHz have been realized on 100 /spl mu/m liquid crystal polymer (LCP) substrate. This paper presents for the first time a MEMS phase shifter on a flexible, organic substrate. LCP is a well-suited substrate for low-cost, low-loss, and near-hermetic applications. Multibit phase shifters have applications in almost all microwave devices, but are most commonly used in phased antenna arrays, which can be realized on a rollable substrate using this technology. The one-bit phase shifters have an average return loss of 19.0 dB and an average insertion loss of 0.59 dB at 14 GHz. The phase shifts are within 1.38/spl deg/ of the intended phase shift at this frequency. For the two-bit phase shifters, an average return loss of 22.5 dB and an average insertion loss of 0.98 dB were measured per bit. The average phase error for the two-bit phase shifter is only 1.26/spl deg/.