Thermal stability of diamond-like carbon films deposited by plasma based ion implantation technique with bipolar pulses

Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon films

R. O. Dillon, John A. Woollam, V. Katkanant · Physical review. B, Condensed matter · 1984 · 1.1K citations

Natural Sciences, Materials Engineering, Materials Science +14

Tribological behavior of silicon-incorporated diamond-like carbon films

Myeong‐Geun Kim, Kwang‐Ryeol Lee, Kwang Yong Eun · Surface and Coatings Technology · 1999 · 107 citations

Engineering, Materials Engineering, Materials Science +12

Deposition of diamond-like carbon films using plasma based ion implantation with bipolar pulses

S. Miyagawa, Setsuo Nakao, M. Ikeyama et al. · Surface and Coatings Technology · 2002 · 90 citations

Natural Sciences, Materials Engineering, Materials Science +7

Improved high-temperature stability of Si incorporated a-C:H films

S.S. Camargo, A.L. Baia Neto, Raphael Santos et al. · Diamond and Related Materials · 1998 · 87 citations

Natural Sciences, Materials Engineering, Materials Science +14

Effect of radio-frequency power and substrate temperature on properties of hot-plasma-box glow-discharge-deposited hydrogenated amorphous silicon carbon alloys

D. M. Bhusari, S. T. Kshirsagar · Journal of Applied Physics · 1993 · 50 citations

Natural Sciences, Materials Engineering, Materials Science +17