VLSI and intelligent transducers

A monolithic capacitive pressure sensor with pulse-period output

C. Sander, James W. Knutti, J.D. Meindl · IEEE Transactions on Electron Devices · 1980 · 189 citations

Engineering, Mechanical Engineering, Instrumentation +15

Minimum Size and Maximum Packing Density of Nonredundant Semiconductor Devices

J. T. Wallmark, S. Marcus · Proceedings of the IRE · 1962 · 148 citations

Engineering, Computer Engineering, Electrical Engineering +17

Integrated signal conditioning for silicon pressure sensors

John M. Borky, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 92 citations

Engineering, Bioengineering, Biomedical Engineering +14

Solid State: VLSI: Some fundamental challenges: Defining and designing the products made possible by very-large-scale integration are first on the list of priority tasks

Gordon E. Moore · IEEE Spectrum · 1979 · 71 citations

Engineering, Computer Engineering, Electrical Engineering +16

Miniature capacitive pressure transducers

C.D. Fung, Wen H. Ko · Sensors and Actuators · 1981 · 17 citations

Engineering, Materials Science, Mechanical Engineering +11