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The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition

Materials ScienceMaterials EngineeringAluminium NitrideOptical MaterialsEngineeringApplied PhysicsChemistryChemical DepositionPulsed Laser DepositionChemical Vapor DepositionAtomic Layer DepositionAln FilmsThin Film ProcessingN Source Materials