Applied Surface Science · 2003 · 96 citations · 2 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsPlasma PhysicsSurface ScienceCoatingsPlasma Surface TreatmentPlasma-surface InteractionsPlasma-wall InteractionsSurface ModificationTextile MaterialsCold Plasma ProcessingCold Plasma TreatmentPlasma TreatmentPlasma Treatment Of PolymersPlasma-induced Surface Damage
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Modeling and diagnostic of an SF/sub 6/ RF plasma at low pressure
C. ̃Riccardi, R Barni, Fabio De Colle et al. · IEEE Transactions on Plasma Science · 2000 · 47 citations