Publication | Closed Access
New <i>in situ</i> measurement method for nanoparticles formed in a radio frequency plasma-enhanced chemical vapor deposition reactor
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Citations
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References
2001
Year
Chemical EngineeringEngineeringNanomaterialsNanotechnologyApplied PhysicsPlasma PhysicsChemistryChemical Vapor DepositionPlasma ApplicationPlasma ProcessingPlasma Diagnostics
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