On the formation of binary compounds in Au/InP system

Abstract

The formation and identification of binary compounds in Au-InP system has been reported. The contact reaction was investigated in the temperature range 320–360 °C by the combined use of 2-MeV He+ ions backscattering spectrometry, x-ray diffraction, TEM, and SEM. The results give evidence that both In and P form compounds with gold; formation of oxides has not been observed. A model of metallurgical structure of Au/InP contacts annealed at temperatures below or equal to 360 °C has been proposed.