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Investigation of nanocrystalline diamond films grown on silicon and glass at substrate temperature below 400 °C

Materials ScienceMaterials EngineeringDiamond-like CarbonEngineeringCrystalline DefectsNanomaterialsNanotechnologyCrystal Growth TechnologySubstrate TemperatureApplied PhysicsNanometrologyNanocrystalline Diamond FilmsThin FilmsNanocrystalline MaterialThin Film Processing