MRS Proceedings · 1999 · 14 citations · 5 references
EngineeringMaterials EngineeringMaterials ScienceManufacturing ProcessesMicrofabricationSemiconductor DevicesDefect CharacterizationDefect DetectionDefectsDefects In Electronic MaterialsManufacturing DefectsSemiconductor DefectsDefect AnalysisDefect InspectionProcessing-induced DefectsSemiconductor Wafer InspectionSilicon DefectsSilicon WafersSurface Defect Imaging
5
Ellipsometry and Polarized Light
L. Cox · Optica Acta International Journal of Optics · 1978 · 1.9K citations
Ellipsometry and polarized light
R. M. A. Azzam, N. M. Bashara, D. Thorburn Burns · Analytica Chimica Acta · 1987 · 1.7K citations
James W. Dally, W. F. Riley, A. S. Kobayashi · Journal of Applied Mechanics · 1978 · 1.2K citations · Full text
<i>Detection of Optical and Infrared Radiation</i>
Robert H. Kingston, H. J. Levinstein · Physics Today · 1979 · 196 citations
Two-dimensional state of stress in a silicon wafer
Hancheng Liang, Yong-xiong Pan, Shounan Zhao et al. · Journal of Applied Physics · 1992 · 35 citations
Natural Sciences, Materials Engineering, Materials Science +17