Concepedia
Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2000 · 11 citations · 2 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsCrystal StructureThin FilmsSemiconductor Thin FilmsThin Film Optical PropertiesThin-film MaterialsBoron ChemistryBoron IncorporationSilicon Thin FilmsSynchrotron Diffraction
2
Chemical and compositional changes induced by N+ implantation in amorphous SiC films
N. Laidani, Marco I. Bonelli, A. Miotello et al. · Journal of Applied Physics · 1993 · 42 citations
Natural Sciences, Materials Engineering, Materials Science +17
SiCN Amorphous Materials Chemical Vapour Deposited Using the Si(CH<sub>3</sub>)<sub>4</sub>-NH<sub>3</sub>-H<sub>2</sub> System
A. Bendeddouche, R. Berjoan, E. Bêche et al. · Journal de Physique IV (Proceedings) · 1995 · 11 citations · Full text
Natural Sciences, Chemistry, Materials Science +12