Publication | Closed Access
Soft X-ray lithography of high aspect ratio SU8 submicron structures
104
Citations
10
References
2008
Year
Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicrofabricationX-ray DiffractionApplied PhysicsSoft X-ray LithographyMicroelectronicsX-ray OpticMicrostructureNanolithography Method
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