Concepedia

Publication | Closed Access

Thickness-dependent glass transition temperature of thin resist films for high resolution lithography

DOI

14

Citations

12

References

2006

Year

Sandrine Marceau, J.H. Tortai, J. Tillier, N. Vourdas, I. Raptis, K. Beltsios, K. van Werden
Microelectronic Engineering

References

YearCitations

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