Direct Drawing of Ag Microwiring by Laser-Induced Pyrolysis of Film Prepared from Liquid-Dispersed Metal Nanoparticles

Abstract

Ag microwiring with submicron resolution was fabricated by the laser-induced pyrolysis of a film prepared from liquid-dispersed Ag nanoparticles. The linewidth of the wiring fabricated by this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring fabricated by this technique (1.9×10 -6 Ω cm) is comparable with that of bulk Ag (1.6×10 -6 Ω cm).