T_c of c-Axis-Oriented Y-Ba-Cu-O Films Prepared by CVD

Abstract

YBa 2 Cu 3 O 7- x thin films (0.8 µm in thickness) with c -axis orientation were prepared at 900°C on yttria-stabilized zirconia substrates by chemical vapor deposition using metal chelates as source materials. The onset and completion of the superconductive transition occurred at 89 K and 80 K, respectively, for the film that received in situ oxygen treatment. The oxygen-treated film had metallic resistivity and the resistance ratio (R 273 K / R 100 K ) was 2.