Japanese Journal of Applied Physics · 1988 · 63 citations · 4 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsSolid State PhysicsThin FilmsChemical Vapor DepositionSuperconducting MaterialsSuperconducting Thin FilmsThin Film Electrical PropertiesThin-film MaterialsCuprate SuperconductorsHigh-temperature Superconducting FilmsResistivitySuperconducting PropertiesThin Oxide FilmsThin-film SuperconductorsYttrium Barium Copper Oxide FilmsZirconia
YBa 2 Cu 3 O 7- x thin films (0.8 µm in thickness) with c -axis orientation were prepared at 900°C on yttria-stabilized zirconia substrates by chemical vapor deposition using metal chelates as source materials. The onset and completion of the superconductive transition occurred at 89 K and 80 K, respectively, for the film that received in situ oxygen treatment. The oxygen-treated film had metallic resistivity and the resistance ratio (R 273 K / R 100 K ) was 2.
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