Sensors and Actuators A Physical · 1990 · 20 citations · 2 references
EngineeringElectrical EngineeringMechanical EngineeringAnalog ElectronicsMicroelectromechanical SystemsSensorsDisplacement MeasurementDisplacement SensorsPhysical SensorsTransducer TechnologyUltrasonicsVibration MeasurementMechanical TransducersMicroelectromechanical Systems TransducersMiniaturized TransducersTransducer DesignTransducer Interface Circuits
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Sensors with digital or frequency output
S. Middelhoek, P.J. French, Johan H. Huijsing et al. · Sensors and Actuators · 1988 · 113 citations