Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties · 1982 · 24 citations · 22 references
EngineeringMaterials SciencePlasma PhysicsRadiation PhysicsRadiation TransportIon ImplantationRadiation Transport In MatterCascade MixingCollisional EvolutionDepth Profile AnalysisGreen's Function FormulationImplantation Profile Modeling
Abstract Various processes contributing to the evolution of high-fluence implantation profiles in solids are considered within a general scheme. In particular the influence of atomic mixing is analysed. A Green function is derived which contains all the information on the instantaneous profile. In the Gaussian approximation, simple expressions for parameters which describe the ion-induced relocation effects on the depth profile are found. The contributions of recoil and cascade mixing are discussed. The relative significance of diffusive and collisional processes on the profiles can also be assessed.
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Thin Films—Interdiffusion and Reactions
J. M. Poate, K. N. Tu, Jean-Claude Mayor et al. · Journal of The Electrochemical Society · 1979 · 1.7K citations
Natural Sciences, Materials Engineering, Materials Science +12
The depth resolution of sputter profiling
H. H. Andersen · Applied Physics A · 1979 · 596 citations