Influence of Si(100) surface pretreatment on the morphology of TiO2 films grown by atomic layer deposition - Concepedia

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Influence of Si(100) surface pretreatment on the morphology of TiO2 films grown by atomic layer deposition

31

Citations

20

References

2003

Year

Kim S. Finnie, Gerry Triani, K. T. Short, David R. G. Mitchell, Darren Attard, John R. Bartlett, Christophe J. Barbé

Thin Solid Films

Materials EngineeringMaterials ScienceChemical EngineeringSurface CharacterizationEngineeringSurface ScienceApplied PhysicsTio2 FilmsSurface PretreatmentThin FilmsChemical DepositionChemical Vapor DepositionAtomic Layer DepositionThin Film Processing

References

	Year	Citations

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