Nano-lithography by electron exposure using an Atomic Force Microscope - Concepedia

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Nano-lithography by electron exposure using an Atomic Force Microscope

20

Citations

14

References

1999

Year

P. Davidsson, Anssi Lindell, Tapio Mäkelä, M. A. Paalanen, J. P. Pekola

Microelectronic Engineering

Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicroscopyNanotechnologyMicrofabricationNanomaterialsApplied PhysicsElectron ExposureNanolithographyNanolithography Method

References

	Year	Citations

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