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EngineeringComputer EngineeringElectrical EngineeringOptical MaterialsOpticsOptoelectronicsDigital Signal ProcessingFrequency-domain AnalysisOptical InstrumentsOptical Signal ProcessingFrequency Domain ProcessingFrequency-domain Response AnalysisLens SurfacingSurfacing Behavior
9
Optimization of computer controlled polishing
Applied Optics · 1977 · 255 citations
Engineering, Manufacturing Engineering, Materials Science +12
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Fabrication and testing of optics for EUV projection lithography
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Engineering, Electrical Engineering, Manufacturing Engineering +8