Statistics
Publications
39
Citations
1.2K
H-Index
21
Active since
1986
John S. Taylor is an author at Lawrence Livermore National Laboratory specializing in optics, engineering, and natural sciences.
Publications per year
1986–2022
39
39
Fabrication and testing of optics for EUV projection lithography
John S. Taylor, Gary E. Sommargren, Donald W. Sweeney et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 45 citations · Full text
Engineering, Electrical Engineering, Manufacturing Engineering +8
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