A NiFeMo Electroplating Bath for Micromachined Structures

Abstract

A number of micromachined magnetic sensors and actuators require materials with desirable magnetic properties such as high permeability and thicknesses in the range of several micrometers. Materials with appropriate magnetic properties have been reported for magnetic storage applications, but often in thickness ranges insufficient for micromachined sensors and actuators. We report the results of an electroplating bath for the deposition of a high permeability, low coercivity material, a alloy. Using this bath, the alloy may be electrodeposited up to in thickness. The residual stress of the electroplated material remains larger than that for (Permalloy) electrodeposits. ©1999 The Electrochemical Society