Investigation of a laser-produced plasma VUV light source

Abstract

An investigation was conducted on the VUV radiation from laser-produced plasmas using a channel electron multiplier detector and a 1.5-m grazing incidence spectrometer. High-resolution quantitative spectra from 8 to 40 nm were obtained from the plasmas generated by a 0.5-J Nd:YAG laser focused on nine different target materials. The effects on the plasma emission of laser energy and focus were measured.