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Topological design of electromechanical actuators with robustness toward over- and under-etching

EngineeringSoft RoboticsMicrofabricationMechanicsTopological DesignMechanical EngineeringMechatronicsMechanical SystemsElectromechanical ActuatorsBiomimetic ActuatorActuationElectronic-mechanical SystemMicroactuatorVibration ControlMicro-electromechanical System