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Piezoelectric properties of sputtered PZT films: influence of structure, micro structure, film thickness (Zr,Ti) ratio and Nb substitution

Materials EngineeringMaterials ScienceEngineeringPiezoelectric NanogeneratorsFilm ThicknessApplied PhysicsSputtered Pzt FilmsPiezoelectric PropertiesPiezoelectricityPiezoelectric MaterialThin FilmsPyroelectricity