Nickel nitride synthesized by nitrogen ion beam sputtering of a nickel target

Abstract

The sputtering of a nickel target with a beam of nitrogen ions is accompanied by the formation of crystalline nickel nitride (Ni 3 N), which is deposited on cold surfaces surrounding the target. A special feature of this synthesis is the low temperature of the process and the formation of this single form of nickel nitride. The products were studied using electron probe microanalysis, X-ray diffraction, and magnetic measurements.