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Deposition of low-resistivity ITO on plastic substrates by DC arc-discharge ion plating

Materials ScienceElectrical EngineeringEngineeringMicrofabricationPlastic SubstratesSurface ScienceApplied PhysicsLow-resistivity ItoSemiconductor Device FabricationElectronic PackagingChemical DepositionMicroelectronicsChemical Vapor DepositionThin Film ProcessingElectrical Insulation