Publication | Closed Access
Low-temperature silicon nitride for thin-film electronics on polyimide foil substrates
60
Citations
13
References
2001
Year
Materials ScienceElectrical EngineeringEngineeringMicrofabricationSilicon On InsulatorApplied PhysicsSemiconductor Device FabricationLow-temperature Silicon NitrideElectronic PackagingThin FilmsThin Film ProcessingSemiconductor Device
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