Effects of gas flow rate on diamond deposition in a microwave plasma reactor - Concepedia

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Effects of gas flow rate on diamond deposition in a microwave plasma reactor

31

Citations

24

References

2006

Year

Wanxin Chen, X. Lu, Q. Yang, C. Xiao, Ramaswami Sammynaiken, Jason Maley, Akira Hirose

Thin Solid Films

EngineeringDiamond DepositionApplied PhysicsMicrowave Plasma ReactorGas Discharge PlasmaGas Flow RatePlasma ApplicationPlasma Processing

References

	Year	Citations

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