Electron-optical design of an X-ray micro-analyser

Abstract

The electron-optical design of an X-ray micro-analyser is considered in some detail with a view to establishing the best design. The electron-optical system has to fulfil conditions not normally encountered - for example, in the electron microscope where the optimum design has been extensively studied. A system is described that has proved suitable for a practical X-ray micro-analyser using magnetic lenses of axial symmetry. Brief reference is made to possible future developments such as the introduction of corrected lenses.