Integrated Sculptured Thin Films

Abstract

We have demonstrated the integration of various morphologies generated by dynamic oblique deposition, during which the deposition angle and the azimuth of the substrate are varied. The layers with zigzag, helicoidal and cylindrical columns have been successfully stacked on a substrate without using any etching process. In addition, the uniform and flat layer is formed on porous layers by a gradual change in the deposition geometry. Therefore, shape-related physical anisotropies and the chemical activity due to high porosity can be integrated in one thin film, making it applicable to devices such as solar cells and chemical sensors.